Metal Machining & Protection Solutions for Semiconductor Manufacturing
Cleanroom and in-vacuum products by FUCHS meet the demanding requirements of the Semiconductor Industry
Manufacturing equipment in vacuum and cleanroom environments are highly sensitive, where even microscopic particulates can cause friction and positioning errors. The best way to ensure lubricant cleanliness is through ultrafiltration to reduce microscopic particulates in a lubricant. We can ultrafilter grease and oil to reduce possible contaminants for semiconductor applications.
Outgassing is akin to evaporation; it is the release of small fractional molecules from a bulk liquid or solid material. Evaporation losses accelerate when operating in vacuum and compromise a lubricant’s integrity over time. Low outgassing lubricants have a lower material loss to ensure longer-lasting lubrication. Outgassed molecules can also condense on surfaces and contaminate wafers, processing equipment, and other sensitive components. Lubricant outgassing is measured in total mass loss (TML) and collected volatile condensable materials (CVCM) per ASTM E595. Our lubricants are tested to this standard to meet the stringent outgassing limits determined by the semiconindustry.
Dynamic particle generation happens when contaminants are created by being forced or expelled from a lubricated ball-screw, bearing, or gear system into the operating environment. These contaminants could include base oil constituents, thickener particles, additives, etc. and are freed from the grease through rolling, sliding, or a combination of both. Our proprietary test method and apparatus allows us to measure particle generation under these dynamic conditions.
A lubricant must be able to protect the mechanical components of fab equipment at high temperatures without evaporating. Outgassing is more likely to happen at high temperatures as vapor pressure increases. Many of our in-vacuum and cleanroom lubricants are formulated to perform at temperatures up to 250 °C.
Advantages of dedicated and specific metalworking fluids
FUCHS not only offers the latest HiO/GRADE 1 and GRADE 2 certified cooling lubricants approved by ASML and DMG MORI, but also compatible cleaning and corrosion protection solutions for the entire corresponding production processes.
Approved Lubricant Solutions for Semiconductor Applications
High performance metal working fluids
ECOCOOL GLOBAL 1000 received the ASML approval for GRADE 2 parts in Dec. 2022
Product with the highest test performance and excellent cleaning ability.
Product | Type | Semicon-related Approvals | Features |
ECOCOOL GLOBAL 1000 | Emulsion | ASML - Grade 2 Application | Aerospace approvals Outperformed established products Sustainable product GLOBALY available Product tested and approved by many Key Accounts GROB and DMG MORI Problem solver (performance, foam, etc.) Multi metal compatible |
Product | Type | Approvals | Features |
ECOCOOL SCE-IDM | Semi-synthetic solution - HiO uncritical formulation | Approved by DMG MORI | Tailor made for GRADE 1 applications Excellent lubrication and performance Very good compatibility with aluminum alloy 2024, 5083, 6061, 7050, 7075 Suitable for yellow metal machining Excellent emulsion stability / low foam tendency Less skin irration and high material compatibility due to low pH value |
ECOCOOL SCS-IDM | Fully-synthetic solution - HiO uncritical formulation | Approved by DMG MORI | Tailor made for GRADE 1 applications High lubrication and performance Excellent compatibility with aluminum alloy 2024, 5083, 6061, 7050, 7075 Less skin irritation and high material compatibility due to low pH value low foam tendency |
The RENOCLEAN product range from FUCHS offers cleaners for a large number of different processes and applications, and ensures convincing cleaning performance with high efficiency. The RENOCLEAN cleaners for professional use, particularly in the metalworking industry, excel through their high washing effect, smooth processes and economical use.
With ANTICORIT, FUCHS offers a wide selection of different corrosion protection.
The ANTICORIT products from FCUHS are temporary corrosion preventatives that can be easily removed if necessary without impairments to the surfaces to be protected.
